B. Ruhstaller, T.A. Beierlein, R. Gmür, S. Karg, H. Riel, G. Sartoris, H. Schwarzenbach, W. Riess
Proc. of the Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2.-4. Sept. 2004, (Editors: G. Wachutka, G. Schrag), Springer-Verlag, ISBN 3-211-22468-8, 2004.
https://link.springer.com/chapter/10.1007/978-3-7091-0624-2_37
PDF