Hydrogen-assisted low-temperature plasma-enhanced chemical vapor deposition of thin film encapsulation layers for top-emission organic light-emitting diodes
Junmo Kim, Jeong Ha Hwang, Yong Woo Kwon, Hyeong Woo Bae, Myungchan An, Wonho Lee, Donggu Lee,
Organic Electronics, Volume 97, 2021, 106261,
doi.org/10.1016/j.orgel.2021.106261.
This report details the use of SiNx as encapsulation material. Thickness variation results on EQE were supported by I_OC simulations performed by Setfos.